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國際污染控制學(xué)術(shù)論文集目錄(第十六屆)
Table of Contents, Proceedings on Contamination Control Issued During the 16th ICCCS Conference (1)
污染控制
Contamination Control
手段Ⅰ
Facilities I
1、 地板風(fēng)速測量來(lái)檢驗潔凈室氣流的平行性
Clean Space Airflow Parallelism Verification from Floor Velocity
Measurements
米切爾.居 Michael D. Jue
2、 用通風(fēng)效率評估法對"前開(kāi)式潔凈容器"(FOUP)系統的潔凈室內氣流特性進(jìn)行
的研究
A Study on the Airflow Performance in Cleanrooms with "FOUP" Systems
by Using an Evaluation Method for Ventilation Efficiency
高橋尾谷Yoshihide Suwa
3、 開(kāi)發(fā)簡(jiǎn)化步驟,測量室內空氣分布
Development of Simplified Measuring Procedure for Indoor Age-of -Air Distributions
佐藤多一、高橋尾谷、藤本壯一 Satoru Doi, Yoshihide Suwa, and Shigeru
Sakamoto
4、 國家核聚變研究設施粒子束通道及動(dòng)力系統的潔凈建造約定
Clean Construction Protocol for the National Ignition Facility
Beampath and Utilities
斯坦利.索馬,艾明.斯道爾,大衛.萬(wàn)德文,羅伯特.普瑞茅,蘇.史帝文森
Stanley C. Sommer, Irving F.Stowers, David E. Van Doren, Robert A.
Predmore, and Sue A. Stephenson
5、 潔凈室氣流層控制
Cleanroom Airflow Laminarity Controls
喬治o汀諾雷 George Ting-Kwo Lei
潔凈室運行Ⅰ
Cleanroom Operations I
6、 使用小型NO2儀表分析潔凈室空氣
Analysis in Clean Room Air Using Small NO2 Meter
古村合志、上原敬二、筱冢功、節部園實(shí)、鶴信二、佐佐木茂園、數本則園 Atsushi Komura,Keiji Uehara, Isao Shinozuka, Sonomi Kushibe,
Shinji Tsuru, Shigekuni Sasaki, and Norikuni Yabumoto
7、 對排放氣流時(shí)間變化的評估
Estimate of Time Change of the Gas Emission Flux
田村啟、藤井秀二、鉤直木 Hajime Tamura, Shuji Fujii, and Naoki Kagi
8、 開(kāi)發(fā)超聲提取法評估靜電強化顆粒沉淀式晶片存儲箱的潔凈度
Development of an Ultrasonic Extraction Method of Evaluate the
Cleanliness of Wafer Storage Boxes Prepared by Electrostatically
Enhanced Particle Deposition
王華平,柯克.米克森,劉本加明 Huaping Wang, Kirk Mikkelsen, and
Benjamin Y. H. Liu
9、 高濃度顆粒環(huán)境下的取樣
Sampling High Concentration Ambient Particles
納康.特培王,納特.瓦瑞斯,蘇加.蘇克邁,阿拉克.李 Nakorn Tippayawong,
Nat Vorayos, Sujja Suksamai, and Aleck Lee
懸浮分子污染 Ⅰ
Airborne Molecular Contamination I
10、使用溫度壓力箱對衛星部件進(jìn)行氣體釋放試驗
Outgassing Experiment on a Satellite Component Using Bake-Out Chamber
樸貴文、蔡索文、何均索、李醒宏、李東金、李星漢 Guee-Won Moon, Seok-
Weon Choi,Hee-Jun Seo, Sang-Hoon Lee, Dong-Jin Lee, and Sang-Seol Lee
11、潔凈室空氣中酸性和堿性化合物在硅晶片表面的沾附特性
Sticking Behavior of Acidic and Basic Compounds in Clean Room Air
onto Silicon Wafer Surface
桃來(lái)加奈、武田菊男、飯川伶子、尾川紀子、今井諄、藤本武利
Kana Momoji, Kikuo Takeda,Reiko Likawa, Noriko Ohkawa, Makoto Imai,
and Taketoshi Fujimoto
12、建筑材料以其內部特性散發(fā)揮發(fā)性有機化合物的機理
VOC Emission Mechanisms from Building Materials by Considering
International Behavior
鉤直木、藤井秀二、田村啟 Naoki Kagi, Shuji Fujii, and Hajime Tamura
13、以分子模擬化學(xué)污染物的吸收特性
Adsorption Behavior of Chemical Contaminants by Molecular Simulation
悟堂正純、武志全司、友成睦地、三浦國尾、高見(jiàn)知志、久保百治、宮本明榮
Masazumi Godo,Takeshi Takatsuka, Mutsuya Tomonari, Kunio Miura,
Seiichi Takami, Momoji Kubo, andAkira Miyamoto
14、使用溫控石英微量計(TQCM)對潔凈室的分子污染進(jìn)行長(cháng)期測量
Long-Term Measurement of Molecular Contamination in a Cleanroom Using
a Temperature-Controlled Quartz Crystal Microbalance (TQCM)
威廉姆.米切爾 William J. Moitchell
靜電排放
Electrostatic Discharge
15、靜電除塵系統在潔凈室、醫院及醫藥制造中的應用
The Use of Electrostatic Dust Collection Systems in Cleanrooms,
Hospitals, and Pharmaceutical Manufacturing
斯塔特.霍尼格 Stuart A. Hoenig
16、在使用電場(chǎng)及電暈放電的條件下用軟X射線(xiàn)輻射有效地收集超細顆粒
Effective Collection of Ultrafine Particles with Soft X-Ray
Irradiation Under Applied Electric Field and /or Corona Discharge
并木紀和、尾谷芳野、普拉木德-庫卡尼、普拉締姆-比斯瓦斯 Norikazu
Namiki, Yoshio Otani,Pramod Kulkarni, and Pratim Biswas
17、交流電場(chǎng)中帶電的亞微顆粒的聚集特性
Coagulation Behavior of Charged Submicron Particles in Alternating
Electric Field
羅光楚、歐苗德Kwang-Chul Noh and Myung-Do Oh
懸浮分子污染Ⅱ
Airborne Molecular Contamination II
18、確定室內空氣甲醛含量的新取樣管的開(kāi)發(fā)
Development of New Sampling Tube for the Determination of
Formaldehyde in Indoor Air
長(cháng)谷川瞻見(jiàn)、梁本隆司、杉原小市、北坂葛山、村上孝紀、內原勇紀、
竹田菊男 Ayumi Hasegawa, Takashi Harimoto, Koichi Sugihara, Kazuya Kitasaka, Takayuki Murakami,Yuki Uchihara, and Kikuo Takeda
19、懸浮分子污染的研究、控制及監測在半導體與軟盤(pán)驅動(dòng)器制造中的實(shí)際應用
Practical Applications of Assessment, Control, and Monitoring of AMC
in Semiconductor and Disk Drive Manufacturing
奧理斯托夫.穆勒,威廉姆.瓊斯,漢特.奈特 Christopher O. Muller,
William B. Jones, and J. Hunt Knight II
20、懸浮分子污染控制中過(guò)濾系統技術(shù)參數的效果
The Effect of Filter System Technical Parameters on Airborne
Molecular Contamination Control
布魯克斯 Matthew C. Middlebrooks
手段Ⅱ
Facilities II
21、潔凈室環(huán)境系統的能源效率
Energy Performance of Cleanroom Environmental Systems
徐騰芳,威廉姆.斯魯地 Tengfang Xu and William Tschudi
22、隔離裝置表面及空氣中殘余過(guò)氧化氫的生物監測培養基
Culture Media for Microbiological Monitoring in Isolators with
Residual Hydrogen Peroxide on Surfaces and in Air
杰根洪,馬瑞貝克斯,伊龍諾.西普,皮恰.文斯 Juergen Horn,
Maria Backes, Eleonor-C. Schepp, and Petra Wenz
人員污染
Human-Sourced Contamination
23、現代潔凈室服裝系統;潔凈室中人作為懸浮顆粒污染源的新數據
Modern Cleanroom Clothing Systems; New Data on People as
Contamination Source in Clean Rooms with Regard to Airborne
Particulates
貝特.瑞穆勒,本特.龍維斯特 Berit Reinmuller and Bengt Ljungqvist
24、提高潔凈室服裝的效率
Enhancing the Efficiency of Cleanroom Apparel
羅伯特-斯派特 Robert Spector
25、顆粒潔凈度認證系統
The Particle Cleanliness Validation System
愛(ài)英.斯托斯,達拉斯.瑞維扎 Irving F. Stowers and Douglas L. Ravizza
應用Ⅱ:ISO/TC 209
Applications II: ISO/TC 209
26、使用非連續顆粒計數對安裝好的高效過(guò)濾器進(jìn)行泄漏測試--實(shí)用性的調查
Installed HEPA Filter Leak Testing by Using Discrete Particle
Counting-Investigation into Practicability
洛塔o格爾,德克o斯坦尼斯切斯基 Lothar Gail and Dirk Stanischewski
過(guò)濾器的改進(jìn)
Filter Update
27、聚α烯(PAO)氣溶膠對聚四氟乙烯介質(zhì)高效過(guò)濾器(試驗)壓差的作用效果
The Effect of PAO Aerosol Challenge on the Differential Pressure of
a Gore-Tex Media HEPA (Experimental) Filter
羅納德.羅伯特,代夫.阿那德 Ronald Roberts and Dave Arnold
28、帶高效過(guò)濾器的小型空氣潔凈器現場(chǎng)維修的消毒方法
The Sterilizing Method for the Small Air Cleaner with HEPA Filter,
When the Maintenance Is at the Site
安迪.瓦特那勃,塔卡由基.塔那卡 Andy Watanabe and Takayuki Tanaka
29、使用晶片暴露方式及試驗性風(fēng)機過(guò)濾器單元評估化學(xué)過(guò)濾器
Evaluation of Chemical Filter Using Wafer Exposure Method and
Experimental FFU
野中立夫、武田久男、飯川理行、多伊良俊一、藤本竹利
Tatsuo Nonaka, Kikuo Takeda,Reiko Likawa, Toshikazu Taira, and Taketoshi Fujimoto
30、清除有機污染的陶瓷化學(xué)過(guò)濾器
Ceramic Chemical Filter for Removal of Organic Contaminants
坂田壯一郎、高橋秀遠、佐藤克三、古村秀遠
Soichiro Sakata, Hideto Takahashi, Katsumi Sato, and Atsushi Takahashi
大學(xué)文章
University Presentation
31、半導體制造設施建設中的資源要求
Resource Requirements for Construction of a Semiconductor
Manufacturing Facility
安諾哈夫o巴格瓦,貝爾克茲.鄂茲特米爾,阿蘭.恰西
Anubhav Bhargava, Balkiz Oztemir, and Allan D. Chasey
32、先進(jìn)技術(shù)環(huán)境的規范、標準及符合規范的替代模式
Codes and Standards and Alternate Code Compliance Model for Advanced
Technology Environments
杰尼弗.瓊斯,阿蘭.洽西
Jennifer A. Jones and Allan D. Chasey
33、半導體設施程式化,減少設施建設費
Benchmarking Semiconductor Facilities to Reduce Facility
Construction Costs
杰夫o瓊斯,沙羅克,阿蘭洽西
Jeff Jones, Shawn O'Rourke, and Allan D. Chasey
ISO14644-1及-2與FED-STD-209E對比
Comparison of ISO14644-1 and -2 and FED-STD-209E
34、通常對ISO14644-1及-2與FED-STD-209之間差別的誤解--對不了解的事會(huì )
付出代價(jià)
Common Misconceptions About the Differences Between ISO 14644-1
and -2 and FED-STD-209E-What You Don't Know Could Cost You
羅伯特.米克 Robert Mielke
潔凈室運行Ⅱ
Cleanroom Operations II
35、關(guān)于懸浮顆粒計數器校準的討論
Discussions About Calibration of Airborne Particle Counters
劉俊杰,劉斌,朱能,王俊山 Junjie Liu, Bin Liu, Neng Zhu, and
Junshan Wang
36、潔凈工作臺空氣流速的均勻性和湍流度研究
Study on Air Velocity Uniformity and Turbulivity Under Clean Bench
劉俊杰,涂光備,馬久先,杜曉剛 Junjie Liu, Guangbei Tu, Jiuxian Ma,
and Xiaogang Du
37、醫藥業(yè)安全通風(fēng)概念的風(fēng)淋效率
The Efficiency of Air Showers as a Safety Ventilation Concept in the
Pharmaceutical Industry
拉斯,伊勃格,尤夫.庫格 Lars E. Ekberg and Ulf Kruger
38、乳膠手套過(guò)敏:摩托羅拉的經(jīng)驗
Latex Glove Allergy: The Motorola Experience
包勃.貝克 Bob Baker
39、潔凈室及防止生物擴散
Cleanroom and Biocontainment
依米羅.莫埃 Emilio Moia
與污染控制相關(guān)的設計、測試及評估
Joint DTE/CC
內部空氣質(zhì)量
Internal Air Quality
40、干燥空氣(環(huán)境)下自然氧化層在硅表面的生長(cháng)
Native Oxide Growth on a Silicon Surface Under a Dry Atmosphere
上村哲,藤井正儀Satoshi Uemura and Masanori Fujii
41、過(guò)濾器編織材料穿透性研究
Study on Permeability of Woven Filter Materials
康永,張雨新,張忠國,孔新軍 Yong Kang, Yuxin Zhang, Zhongguo Zhang,
and Xinjun Kong
42、通風(fēng)效率及測試方法的研究
The Research About Ventilation Efficiency and Test Methods
李津光,依德伍德.涂,涂光備 Jingguang Li, Edward Tu, and Guangbei Tu
43、影響通風(fēng)室內部濃度的因素分析
The Analysis of Factors Affecting Concentration in the
Ventilation Room
李津光,依德伍德.涂,涂光備 Jingguang Li, Wdward Tu, and Guangbei Tu
44、高效過(guò)濾器測試統計學(xué)上的顯著(zhù)效率
Statistically Significant Efficiency Testing of HEPA Filters
王文立,菲利浦.文特斯 Wenli Wang and Philip J. Winters
設計、測試及評估 Design, Test & Evaluation
分析技術(shù)Ⅰ
Analysis Techniques I
45、以極端響應頻譜(ERS)及疲勞損傷頻譜(FDS)撰寫(xiě)機械振動(dòng)技術(shù)條件
Writing a Mechanical Vibration Specification from ERS and FDS
克瑞斯坦.拉蘭,米歇爾.保佑 Christian Lalanne and Michel Bozio
46、空氣波動(dòng)造成的艙(氣)室側力近似值
Approximation of Side Force Due to Aerodynamic Fluctuations on an
Airborne Store
舍夫o浩斯通,魯林爾 Z. Sherf, P. Hopstone, and E. Lubliner
47、雙輪拖車(chē)拉桿的模態(tài)測量
Modal Survey of Two-Wheeled Trailer Drawbar
喬治.懷特 Geoge O. White
48、模態(tài)測量測試與振動(dòng)評定測試:綜合方法
Modal Survey Testing and Vibration Qualification Testing: The
Integrated Approach
巴特.皮特斯,赫曼.萬(wàn).安沃爾,帕克.貴爾 Bart Peeters, Herman Van der
Auweraer, and Patrick Guillaume
49、動(dòng)能導彈發(fā)射環(huán)境下惰性測量傳感器的振動(dòng)隔絕
Shock Isolation of Inertial Measurement Sensors Subjected to Kinetic
Energy Missile Launch Environments
魯賽爾.戈恩爾,斯潘舍.哈德森 Russll S. Garner and Spencer L. Hudson
可靠性分析和測試
Reliability Analysis and Test
50、熱聲聯(lián)合激勵下環(huán)境應力隔離頻譜模擬
ESS Spectrum Tailoring with Combined Thermal and Acoustical
Excitation
福朗科斯.拉夫爾,馬可.拉莫斯,夫瑞德瑞克.拉維爾 Francois Lafleur,
Marc Thomas, and Frederic Laville
51、環(huán)境測試系統的新趨勢
New Trends in Environmental Test Systems
底特.豪斯 Dieter Haus
52、系統模擬及提高可靠性的故障樹(shù)狀分析
Fault Tree Analysis for System Modeling and Reliability Growth
邁爾那.柯拉斯切 Milena Krasich
53、另一種類(lèi)型的故障源判定實(shí)例記載
A Different Type of HALT Stimulus Case History
喬治.漢德森,金柯?tīng)?George Henderson and Kim Kral
54、自然環(huán)境下降低費用的全壽命測試
Testing in Natural Environments for Total Ownership Cost Reduction
羅格o威廉姆松 Roger L. Williamson
55、高加速應力隔離的實(shí)施步驟
Implementation of the HASS Process
吉爾伯特.巴斯汀 Gilbert Bastien
分析技術(shù)Ⅱ
Analysis Techniques II
56、隨機波型合成與脈沖計數
Random Waveform Synthesis and Scaling
漢斯o格容勃格 Hans S. Gruenberger
57、取樣率改變時(shí)振動(dòng)響應頻譜的計算
Calculation of the Shock Response Spectrum (SRS) with a Change in
Sampling Rate
大衛.斯摩德 David O. Smallwood
58、多入多出(MIMO)隨機振動(dòng)評定測試:算法及實(shí)際經(jīng)驗
MIMO Random Vibration Qualification Testing: Algorithm and
Practical Experience
巴特.皮特及簡(jiǎn)-德比爾 Bart Peeters and Jan Debille
59、多激勵器測試應用:理論與實(shí)踐
Multi-exciter Testing Application: Theory and Practice
馬科恩.安德伍德 Marcos Underwood
持續性--基礎與概念
Sustainability-Basic and Concepts
60、持續性--工業(yè)應用,選擇方案及市場(chǎng)機會(huì )
Sustainability-Industrial Implementations, Options, and
Market Opportunities
卡爾-夫德切吉根,赫爾馬-斯舒博特及托馬斯.赫斯 Karl-Friedrich Ziegahn,
Hiltmar Schubert, and Thomas Hirth
61、瞄準持續性的新產(chǎn)品和新工藝
New Products and Processes Aiming on Sustainability
托馬斯.赫斯,赫爾馬-斯舒博特,卡爾-夫德切吉根 Thomas Hirth,
Hiltmar Schubert, and Karl-Friedrich Ziegahn
62、持續性的獲得--如何彌補理念與實(shí)施間的差異
Management of Subtainability-How to Overcome the Gap Between
Theoretical Concepts and Practical Implementation
赫爾馬o斯舒博特,卡爾-夫德切吉根,托馬斯.赫斯 Hiltmar Schubert,
karl-Friedrich Ziegahn, and Thomas Hirth
63、合成木(包裝材料)樣塊(性能)測試
Investigation on Composite Wood Blocks
迪特.格勃爾 Dieter Greubel
溫度測試,數據與分析
Thermal Test, Date, and Analysis
64、以為是穩定的?有關(guān)MIL-STD-810E圖501.3-1的新考慮
Think It's Stabilized? New Considerations About Figure 501.3-1 of
MIL-STD-810E
馬科斯.都邁林,尤利.格羅森,托馬斯.拉德拉切 Markus Dumelin,
Ueli Grossen, and Thomas Laederach
測試方法Ⅰ
Test Methods I
65、電子設備真實(shí)的或模擬的熱沖擊效果
Effects of Real or Simulated Pyroshocks on Electronic Equipment
亨瑞o格茲庫維克 Henri Grzeskowiak
66、數字式損傷儀記錄的飛行數據一瞥
A Quick Look at Flight Data from a Digital Damage Dosimeter
大衛o本扎克,旦森.布朗,安杰拉.特格 David Banaszak, Dansen Brown,
and Angela Trego
67、測試一致性的幾個(gè)問(wèn)題
Several Questions of Consistency in Our Testing
茲夫.舍夫及菲利浦.蒙斯東 Zeev Sherf and Philip Hopstone
68、能源概算誤差與參數的不準確性之間的關(guān)系
The relationship Between the Variance of Energy Estimates and the
Uncertainty Parameter
大衛.斯馬烏德 David O.Smallwood
摸擬測試技術(shù)
Modeling/Simulation Test Technologies
69、大型復雜動(dòng)力系統結構模式的概率數字分析
Probabilistic Numerical Analysis of Large, Complex, Structural
Dynamic System Models
安杰.爾賓那和托馬斯.帕茲 Angel Urbina and Thomas L.Paez
70、對美國宇航局火星開(kāi)拓者空間飛行器因發(fā)射聲音負載造成的高頻振動(dòng)響應的能
源統計分析預測及認證
Prediction and Validation of High Frequency Vibration Responses of
NASA Mars Pathfinder Spacecraft Due to Acoustic Launch Load
Using Statistical Energy Analysis
霍-金 黃 Ho-Jin Hwang
測試設施
Test Facilities
71、介紹韓國宇航研究所使用的高強度聲音測試設施
Introduction to a High-Intensity Acoustic Test Facility at Korea
Aerospace Research Inwstitute
金永凱,金洪北,樸宋木,吳星現,李松漢 Youngkey K.Kim, Hong-Bae Kim,
Sang-Mu Moon,Sung-Hyun Woo, and Sang-Seol Lee
72、振動(dòng)/沖擊測試設施計劃
Planning Your Vibration/Shock Test Facility
威恩.圖汀 Wayne Tustin
測試方法Ⅱ
Test MethodsⅡ
73、造成機載系統的真正壽命與試驗室振動(dòng)測試間差異的因素
What Can Make the Difference Between the Real Life of an Airborne
System and a Laboratory Vibration Test
茲夫.舍夫及菲利浦.豪斯東 Zeev Sherg and Philip Hopstone
74、電子硬件的摸擬改進(jìn)測試
Simulation Improved Testing of Electronic Hardware
米謝爾.奧斯曼 Michael Osterman
75、檢驗傳統的振動(dòng)機器造成的振動(dòng)與電動(dòng)振動(dòng)機造成的振動(dòng)之間的功能性差別
Examination of Functional Differences Between Shocks Delivered by
Conventional Shock Machines and Shocks Delivered by Electrodynamic
Shakers
大衛.格邦斯 David Gibbons
軍事項目中使用商業(yè)產(chǎn)品(COTS)的經(jīng)驗
COTS Experience on Military Programs
76、保證在空軍系統中成功地使用商業(yè)產(chǎn)品
Ensuring Successful Implementation of Commercial Items in Air
Force Systems
肯尼斯.布朗 Kenneth M.Brown
第十六屆國際污染控制學(xué)術(shù)論文集目錄 (一)
Table of Contents, Proceedings on Contamination Control Issued During the 16th ICCCS Conference (1)
污染控制
Contamination Control
手段Ⅰ
Facilities I
1、 地板風(fēng)速測量來(lái)檢驗潔凈室氣流的平行性
Clean Space Airflow Parallelism Verification from Floor Velocity
Measurements
米切爾.居 Michael D. Jue
2、 用通風(fēng)效率評估法對"前開(kāi)式潔凈容器"(FOUP)系統的潔凈室內氣流特性進(jìn)行
的研究
A Study on the Airflow Performance in Cleanrooms with "FOUP" Systems
by Using an Evaluation Method for Ventilation Efficiency
高橋尾谷Yoshihide Suwa
3、 開(kāi)發(fā)簡(jiǎn)化步驟,測量室內空氣分布
Development of Simplified Measuring Procedure for Indoor Age-of -Air Distributions
佐藤多一、高橋尾谷、藤本壯一 Satoru Doi, Yoshihide Suwa, and Shigeru
Sakamoto
4、 國家核聚變研究設施粒子束通道及動(dòng)力系統的潔凈建造約定
Clean Construction Protocol for the National Ignition Facility
Beampath and Utilities
斯坦利.索馬,艾明.斯道爾,大衛.萬(wàn)德文,羅伯特.普瑞茅,蘇.史帝文森
Stanley C. Sommer, Irving F.Stowers, David E. Van Doren, Robert A.
Predmore, and Sue A. Stephenson
5、 潔凈室氣流層控制
Cleanroom Airflow Laminarity Controls
喬治o汀諾雷 George Ting-Kwo Lei
潔凈室運行Ⅰ
Cleanroom Operations I
6、 使用小型NO2儀表分析潔凈室空氣
Analysis in Clean Room Air Using Small NO2 Meter
古村合志、上原敬二、筱冢功、節部園實(shí)、鶴信二、佐佐木茂園、數本則園 Atsushi Komura,Keiji Uehara, Isao Shinozuka, Sonomi Kushibe,
Shinji Tsuru, Shigekuni Sasaki, and Norikuni Yabumoto
7、 對排放氣流時(shí)間變化的評估
Estimate of Time Change of the Gas Emission Flux
田村啟、藤井秀二、鉤直木 Hajime Tamura, Shuji Fujii, and Naoki Kagi
8、 開(kāi)發(fā)超聲提取法評估靜電強化顆粒沉淀式晶片存儲箱的潔凈度
Development of an Ultrasonic Extraction Method of Evaluate the
Cleanliness of Wafer Storage Boxes Prepared by Electrostatically
Enhanced Particle Deposition
王華平,柯克.米克森,劉本加明 Huaping Wang, Kirk Mikkelsen, and
Benjamin Y. H. Liu
9、 高濃度顆粒環(huán)境下的取樣
Sampling High Concentration Ambient Particles
納康.特培王,納特.瓦瑞斯,蘇加.蘇克邁,阿拉克.李 Nakorn Tippayawong,
Nat Vorayos, Sujja Suksamai, and Aleck Lee
懸浮分子污染 Ⅰ
Airborne Molecular Contamination I
10、使用溫度壓力箱對衛星部件進(jìn)行氣體釋放試驗
Outgassing Experiment on a Satellite Component Using Bake-Out Chamber
樸貴文、蔡索文、何均索、李醒宏、李東金、李星漢 Guee-Won Moon, Seok-
Weon Choi,Hee-Jun Seo, Sang-Hoon Lee, Dong-Jin Lee, and Sang-Seol Lee
11、潔凈室空氣中酸性和堿性化合物在硅晶片表面的沾附特性
Sticking Behavior of Acidic and Basic Compounds in Clean Room Air
onto Silicon Wafer Surface
桃來(lái)加奈、武田菊男、飯川伶子、尾川紀子、今井諄、藤本武利
Kana Momoji, Kikuo Takeda,Reiko Likawa, Noriko Ohkawa, Makoto Imai,
and Taketoshi Fujimoto
12、建筑材料以其內部特性散發(fā)揮發(fā)性有機化合物的機理
VOC Emission Mechanisms from Building Materials by Considering
International Behavior
鉤直木、藤井秀二、田村啟 Naoki Kagi, Shuji Fujii, and Hajime Tamura
13、以分子模擬化學(xué)污染物的吸收特性
Adsorption Behavior of Chemical Contaminants by Molecular Simulation
悟堂正純、武志全司、友成睦地、三浦國尾、高見(jiàn)知志、久保百治、宮本明榮
Masazumi Godo,Takeshi Takatsuka, Mutsuya Tomonari, Kunio Miura,
Seiichi Takami, Momoji Kubo, andAkira Miyamoto
14、使用溫控石英微量計(TQCM)對潔凈室的分子污染進(jìn)行長(cháng)期測量
Long-Term Measurement of Molecular Contamination in a Cleanroom Using
a Temperature-Controlled Quartz Crystal Microbalance (TQCM)
威廉姆.米切爾 William J. Moitchell
靜電排放
Electrostatic Discharge
15、靜電除塵系統在潔凈室、醫院及醫藥制造中的應用
The Use of Electrostatic Dust Collection Systems in Cleanrooms,
Hospitals, and Pharmaceutical Manufacturing
斯塔特.霍尼格 Stuart A. Hoenig
16、在使用電場(chǎng)及電暈放電的條件下用軟X射線(xiàn)輻射有效地收集超細顆粒
Effective Collection of Ultrafine Particles with Soft X-Ray
Irradiation Under Applied Electric Field and /or Corona Discharge
并木紀和、尾谷芳野、普拉木德-庫卡尼、普拉締姆-比斯瓦斯 Norikazu
Namiki, Yoshio Otani,Pramod Kulkarni, and Pratim Biswas
17、交流電場(chǎng)中帶電的亞微顆粒的聚集特性
Coagulation Behavior of Charged Submicron Particles in Alternating
Electric Field
羅光楚、歐苗德Kwang-Chul Noh and Myung-Do Oh
懸浮分子污染Ⅱ
Airborne Molecular Contamination II
18、確定室內空氣甲醛含量的新取樣管的開(kāi)發(fā)
Development of New Sampling Tube for the Determination of
Formaldehyde in Indoor Air
長(cháng)谷川瞻見(jiàn)、梁本隆司、杉原小市、北坂葛山、村上孝紀、內原勇紀、
竹田菊男 Ayumi Hasegawa, Takashi Harimoto, Koichi Sugihara, Kazuya Kitasaka, Takayuki Murakami,Yuki Uchihara, and Kikuo Takeda
19、懸浮分子污染的研究、控制及監測在半導體與軟盤(pán)驅動(dòng)器制造中的實(shí)際應用
Practical Applications of Assessment, Control, and Monitoring of AMC
in Semiconductor and Disk Drive Manufacturing
奧理斯托夫.穆勒,威廉姆.瓊斯,漢特.奈特 Christopher O. Muller,
William B. Jones, and J. Hunt Knight II
20、懸浮分子污染控制中過(guò)濾系統技術(shù)參數的效果
The Effect of Filter System Technical Parameters on Airborne
Molecular Contamination Control
布魯克斯 Matthew C. Middlebrooks
手段Ⅱ
Facilities II
21、潔凈室環(huán)境系統的能源效率
Energy Performance of Cleanroom Environmental Systems
徐騰芳,威廉姆.斯魯地 Tengfang Xu and William Tschudi
22、隔離裝置表面及空氣中殘余過(guò)氧化氫的生物監測培養基
Culture Media for Microbiological Monitoring in Isolators with
Residual Hydrogen Peroxide on Surfaces and in Air
杰根洪,馬瑞貝克斯,伊龍諾.西普,皮恰.文斯 Juergen Horn,
Maria Backes, Eleonor-C. Schepp, and Petra Wenz
人員污染
Human-Sourced Contamination
23、現代潔凈室服裝系統;潔凈室中人作為懸浮顆粒污染源的新數據
Modern Cleanroom Clothing Systems; New Data on People as
Contamination Source in Clean Rooms with Regard to Airborne
Particulates
貝特.瑞穆勒,本特.龍維斯特 Berit Reinmuller and Bengt Ljungqvist
24、提高潔凈室服裝的效率
Enhancing the Efficiency of Cleanroom Apparel
羅伯特-斯派特 Robert Spector
25、顆粒潔凈度認證系統
The Particle Cleanliness Validation System
愛(ài)英.斯托斯,達拉斯.瑞維扎 Irving F. Stowers and Douglas L. Ravizza
應用Ⅱ:ISO/TC 209
Applications II: ISO/TC 209
26、使用非連續顆粒計數對安裝好的高效過(guò)濾器進(jìn)行泄漏測試--實(shí)用性的調查
Installed HEPA Filter Leak Testing by Using Discrete Particle
Counting-Investigation into Practicability
洛塔o格爾,德克o斯坦尼斯切斯基 Lothar Gail and Dirk Stanischewski
過(guò)濾器的改進(jìn)
Filter Update
27、聚α烯(PAO)氣溶膠對聚四氟乙烯介質(zhì)高效過(guò)濾器(試驗)壓差的作用效果
The Effect of PAO Aerosol Challenge on the Differential Pressure of
a Gore-Tex Media HEPA (Experimental) Filter
羅納德.羅伯特,代夫.阿那德 Ronald Roberts and Dave Arnold
28、帶高效過(guò)濾器的小型空氣潔凈器現場(chǎng)維修的消毒方法
The Sterilizing Method for the Small Air Cleaner with HEPA Filter,
When the Maintenance Is at the Site
安迪.瓦特那勃,塔卡由基.塔那卡 Andy Watanabe and Takayuki Tanaka
29、使用晶片暴露方式及試驗性風(fēng)機過(guò)濾器單元評估化學(xué)過(guò)濾器
Evaluation of Chemical Filter Using Wafer Exposure Method and
Experimental FFU
野中立夫、武田久男、飯川理行、多伊良俊一、藤本竹利
Tatsuo Nonaka, Kikuo Takeda,Reiko Likawa, Toshikazu Taira, and Taketoshi Fujimoto
30、清除有機污染的陶瓷化學(xué)過(guò)濾器
Ceramic Chemical Filter for Removal of Organic Contaminants
坂田壯一郎、高橋秀遠、佐藤克三、古村秀遠
Soichiro Sakata, Hideto Takahashi, Katsumi Sato, and Atsushi Takahashi
大學(xué)文章
University Presentation
31、半導體制造設施建設中的資源要求
Resource Requirements for Construction of a Semiconductor
Manufacturing Facility
安諾哈夫o巴格瓦,貝爾克茲.鄂茲特米爾,阿蘭.恰西
Anubhav Bhargava, Balkiz Oztemir, and Allan D. Chasey
32、先進(jìn)技術(shù)環(huán)境的規范、標準及符合規范的替代模式
Codes and Standards and Alternate Code Compliance Model for Advanced
Technology Environments
杰尼弗.瓊斯,阿蘭.洽西
Jennifer A. Jones and Allan D. Chasey
33、半導體設施程式化,減少設施建設費
Benchmarking Semiconductor Facilities to Reduce Facility
Construction Costs
杰夫o瓊斯,沙羅克,阿蘭洽西
Jeff Jones, Shawn O'Rourke, and Allan D. Chasey
ISO14644-1及-2與FED-STD-209E對比
Comparison of ISO14644-1 and -2 and FED-STD-209E
34、通常對ISO14644-1及-2與FED-STD-209之間差別的誤解--對不了解的事會(huì )
付出代價(jià)
Common Misconceptions About the Differences Between ISO 14644-1
and -2 and FED-STD-209E-What You Don't Know Could Cost You
羅伯特.米克 Robert Mielke
潔凈室運行Ⅱ
Cleanroom Operations II
35、關(guān)于懸浮顆粒計數器校準的討論
Discussions About Calibration of Airborne Particle Counters
劉俊杰,劉斌,朱能,王俊山 Junjie Liu, Bin Liu, Neng Zhu, and
Junshan Wang
36、潔凈工作臺空氣流速的均勻性和湍流度研究
Study on Air Velocity Uniformity and Turbulivity Under Clean Bench
劉俊杰,涂光備,馬久先,杜曉剛 Junjie Liu, Guangbei Tu, Jiuxian Ma,
and Xiaogang Du
37、醫藥業(yè)安全通風(fēng)概念的風(fēng)淋效率
The Efficiency of Air Showers as a Safety Ventilation Concept in the
Pharmaceutical Industry
拉斯,伊勃格,尤夫.庫格 Lars E. Ekberg and Ulf Kruger
38、乳膠手套過(guò)敏:摩托羅拉的經(jīng)驗
Latex Glove Allergy: The Motorola Experience
包勃.貝克 Bob Baker
39、潔凈室及防止生物擴散
Cleanroom and Biocontainment
依米羅.莫埃 Emilio Moia
與污染控制相關(guān)的設計、測試及評估
Joint DTE/CC
內部空氣質(zhì)量
Internal Air Quality
40、干燥空氣(環(huán)境)下自然氧化層在硅表面的生長(cháng)
Native Oxide Growth on a Silicon Surface Under a Dry Atmosphere
上村哲,藤井正儀Satoshi Uemura and Masanori Fujii
41、過(guò)濾器編織材料穿透性研究
Study on Permeability of Woven Filter Materials
康永,張雨新,張忠國,孔新軍 Yong Kang, Yuxin Zhang, Zhongguo Zhang,
and Xinjun Kong
42、通風(fēng)效率及測試方法的研究
The Research About Ventilation Efficiency and Test Methods
李津光,依德伍德.涂,涂光備 Jingguang Li, Edward Tu, and Guangbei Tu
43、影響通風(fēng)室內部濃度的因素分析
The Analysis of Factors Affecting Concentration in the
Ventilation Room
李津光,依德伍德.涂,涂光備 Jingguang Li, Wdward Tu, and Guangbei Tu
44、高效過(guò)濾器測試統計學(xué)上的顯著(zhù)效率
Statistically Significant Efficiency Testing of HEPA Filters
王文立,菲利浦.文特斯 Wenli Wang and Philip J. Winters
設計、測試及評估 Design, Test & Evaluation
分析技術(shù)Ⅰ
Analysis Techniques I
45、以極端響應頻譜(ERS)及疲勞損傷頻譜(FDS)撰寫(xiě)機械振動(dòng)技術(shù)條件
Writing a Mechanical Vibration Specification from ERS and FDS
克瑞斯坦.拉蘭,米歇爾.保佑 Christian Lalanne and Michel Bozio
46、空氣波動(dòng)造成的艙(氣)室側力近似值
Approximation of Side Force Due to Aerodynamic Fluctuations on an
Airborne Store
舍夫o浩斯通,魯林爾 Z. Sherf, P. Hopstone, and E. Lubliner
47、雙輪拖車(chē)拉桿的模態(tài)測量
Modal Survey of Two-Wheeled Trailer Drawbar
喬治.懷特 Geoge O. White
48、模態(tài)測量測試與振動(dòng)評定測試:綜合方法
Modal Survey Testing and Vibration Qualification Testing: The
Integrated Approach
巴特.皮特斯,赫曼.萬(wàn).安沃爾,帕克.貴爾 Bart Peeters, Herman Van der
Auweraer, and Patrick Guillaume
49、動(dòng)能導彈發(fā)射環(huán)境下惰性測量傳感器的振動(dòng)隔絕
Shock Isolation of Inertial Measurement Sensors Subjected to Kinetic
Energy Missile Launch Environments
魯賽爾.戈恩爾,斯潘舍.哈德森 Russll S. Garner and Spencer L. Hudson
可靠性分析和測試
Reliability Analysis and Test
50、熱聲聯(lián)合激勵下環(huán)境應力隔離頻譜模擬
ESS Spectrum Tailoring with Combined Thermal and Acoustical
Excitation
福朗科斯.拉夫爾,馬可.拉莫斯,夫瑞德瑞克.拉維爾 Francois Lafleur,
Marc Thomas, and Frederic Laville
51、環(huán)境測試系統的新趨勢
New Trends in Environmental Test Systems
底特.豪斯 Dieter Haus
52、系統模擬及提高可靠性的故障樹(shù)狀分析
Fault Tree Analysis for System Modeling and Reliability Growth
邁爾那.柯拉斯切 Milena Krasich
53、另一種類(lèi)型的故障源判定實(shí)例記載
A Different Type of HALT Stimulus Case History
喬治.漢德森,金柯?tīng)?George Henderson and Kim Kral
54、自然環(huán)境下降低費用的全壽命測試
Testing in Natural Environments for Total Ownership Cost Reduction
羅格o威廉姆松 Roger L. Williamson
55、高加速應力隔離的實(shí)施步驟
Implementation of the HASS Process
吉爾伯特.巴斯汀 Gilbert Bastien
分析技術(shù)Ⅱ
Analysis Techniques II
56、隨機波型合成與脈沖計數
Random Waveform Synthesis and Scaling
漢斯o格容勃格 Hans S. Gruenberger
57、取樣率改變時(shí)振動(dòng)響應頻譜的計算
Calculation of the Shock Response Spectrum (SRS) with a Change in
Sampling Rate
大衛.斯摩德 David O. Smallwood
58、多入多出(MIMO)隨機振動(dòng)評定測試:算法及實(shí)際經(jīng)驗
MIMO Random Vibration Qualification Testing: Algorithm and
Practical Experience
巴特.皮特及簡(jiǎn)-德比爾 Bart Peeters and Jan Debille
59、多激勵器測試應用:理論與實(shí)踐
Multi-exciter Testing Application: Theory and Practice
馬科恩.安德伍德 Marcos Underwood
持續性--基礎與概念
Sustainability-Basic and Concepts
60、持續性--工業(yè)應用,選擇方案及市場(chǎng)機會(huì )
Sustainability-Industrial Implementations, Options, and
Market Opportunities
卡爾-夫德切吉根,赫爾馬-斯舒博特及托馬斯.赫斯 Karl-Friedrich Ziegahn,
Hiltmar Schubert, and Thomas Hirth
61、瞄準持續性的新產(chǎn)品和新工藝
New Products and Processes Aiming on Sustainability
托馬斯.赫斯,赫爾馬-斯舒博特,卡爾-夫德切吉根 Thomas Hirth,
Hiltmar Schubert, and Karl-Friedrich Ziegahn
62、持續性的獲得--如何彌補理念與實(shí)施間的差異
Management of Subtainability-How to Overcome the Gap Between
Theoretical Concepts and Practical Implementation
赫爾馬o斯舒博特,卡爾-夫德切吉根,托馬斯.赫斯 Hiltmar Schubert,
karl-Friedrich Ziegahn, and Thomas Hirth
63、合成木(包裝材料)樣塊(性能)測試
Investigation on Composite Wood Blocks
迪特.格勃爾 Dieter Greubel
溫度測試,數據與分析
Thermal Test, Date, and Analysis
64、以為是穩定的?有關(guān)MIL-STD-810E圖501.3-1的新考慮
Think It's Stabilized? New Considerations About Figure 501.3-1 of
MIL-STD-810E
馬科斯.都邁林,尤利.格羅森,托馬斯.拉德拉切 Markus Dumelin,
Ueli Grossen, and Thomas Laederach
測試方法Ⅰ
Test Methods I
65、電子設備真實(shí)的或模擬的熱沖擊效果
Effects of Real or Simulated Pyroshocks on Electronic Equipment
亨瑞o格茲庫維克 Henri Grzeskowiak
66、數字式損傷儀記錄的飛行數據一瞥
A Quick Look at Flight Data from a Digital Damage Dosimeter
大衛o本扎克,旦森.布朗,安杰拉.特格 David Banaszak, Dansen Brown,
and Angela Trego
67、測試一致性的幾個(gè)問(wèn)題
Several Questions of Consistency in Our Testing
茲夫.舍夫及菲利浦.蒙斯東 Zeev Sherf and Philip Hopstone
68、能源概算誤差與參數的不準確性之間的關(guān)系
The relationship Between the Variance of Energy Estimates and the
Uncertainty Parameter
大衛.斯馬烏德 David O.Smallwood
摸擬測試技術(shù)
Modeling/Simulation Test Technologies
69、大型復雜動(dòng)力系統結構模式的概率數字分析
Probabilistic Numerical Analysis of Large, Complex, Structural
Dynamic System Models
安杰.爾賓那和托馬斯.帕茲 Angel Urbina and Thomas L.Paez
70、對美國宇航局火星開(kāi)拓者空間飛行器因發(fā)射聲音負載造成的高頻振動(dòng)響應的能
源統計分析預測及認證
Prediction and Validation of High Frequency Vibration Responses of
NASA Mars Pathfinder Spacecraft Due to Acoustic Launch Load
Using Statistical Energy Analysis
霍-金 黃 Ho-Jin Hwang
測試設施
Test Facilities
71、介紹韓國宇航研究所使用的高強度聲音測試設施
Introduction to a High-Intensity Acoustic Test Facility at Korea
Aerospace Research Inwstitute
金永凱,金洪北,樸宋木,吳星現,李松漢 Youngkey K.Kim, Hong-Bae Kim,
Sang-Mu Moon,Sung-Hyun Woo, and Sang-Seol Lee
72、振動(dòng)/沖擊測試設施計劃
Planning Your Vibration/Shock Test Facility
威恩.圖汀 Wayne Tustin
測試方法Ⅱ
Test MethodsⅡ
73、造成機載系統的真正壽命與試驗室振動(dòng)測試間差異的因素
What Can Make the Difference Between the Real Life of an Airborne
System and a Laboratory Vibration Test
茲夫.舍夫及菲利浦.豪斯東 Zeev Sherg and Philip Hopstone
74、電子硬件的摸擬改進(jìn)測試
Simulation Improved Testing of Electronic Hardware
米謝爾.奧斯曼 Michael Osterman
75、檢驗傳統的振動(dòng)機器造成的振動(dòng)與電動(dòng)振動(dòng)機造成的振動(dòng)之間的功能性差別
Examination of Functional Differences Between Shocks Delivered by
Conventional Shock Machines and Shocks Delivered by Electrodynamic
Shakers
大衛.格邦斯 David Gibbons
軍事項目中使用商業(yè)產(chǎn)品(COTS)的經(jīng)驗
COTS Experience on Military Programs
76、保證在空軍系統中成功地使用商業(yè)產(chǎn)品
Ensuring Successful Implementation of Commercial Items in Air
Force Systems
肯尼斯.布朗 Kenneth M.Brown
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